| �aƷ���Q�� | HL-200-����NH3�z�y�x |
| ��̖ | �z�y���� | ���Wʽ | �z�y���� | �z�y�`�� | ��Сʾֵ | 90%푑��r�g | ���O��ֵ �͈�/�߈� |
| 0 | �� �� �� | PH3 | ��0-20-200��×10-6 | ±5%�M���̣��ԃ� | 0.1×10-6 | 90s�ԃ� | 0.3×10-6/5.0×10-6 |
| 1 | �� �� | O2 | ��0.0-25.0��% | ±0.5%���M���̣��ԃ� | 0.10% | 60s�ԃ� | ≤18.0% / ≥23.0% |
| 2 | ��ȼ�Ԛ��w | Ex | ��0-100��%LEL | ±5%���M���̣��ԃ� | 1%LEL | 60s�ԃ� | 25.0% / 50.0% LEL |
| 3 | һ����̼ | CO | ��0-2000��×10-6 | ±5%���M���̣��ԃ� | 1×10-6 | 60s�ԃ� | 50×10-6/ 100×10-6 |
| 4 | �� �� �� | H2S | ��0-200��×10-6 | ±5%���M���̣��ԃ� | 0.1×10-6 | 60s�ԃ� | 10×10-6/ 20×10-6 |
| 5 | �������� | NO2 | ��0-200��×10-6 | ±5%���M���̣��ԃ� | 0.1×10-6 | 60s�ԃ� | 3×10-6/ 10×10-6 |
| 6 | һ������ | NO | ��0-1000��×10-6 | ±5%���M���̣��ԃ� | 1×10-6 | 60s�ԃ� | 25×10-6/ 50×10-6 |
| 7 | �������� | SO2 | ��0-200��×10-6 | ±5%���M���̣��ԃ� | 0.1×10-6 | 60s�ԃ� | 2×10-6/ 10×10-6 |
| 8 | �� �� | Cl2 | ��0-200��×10-6 | ±5%���M���̣��ԃ� | 0.1×10-6 | 60s�ԃ� | 1×10-6/ 10×10-6 |
| 9 | �� �� | NH3 | ��0-200��×10-6 | ±5%���M���̣��ԃ� | 0.1×10-6 | 150s�ԃ� | 25×10-6/ 50×10-6 |
| 10 | �� �� | H2 | ��0-2000��×10-6 | ±5%���M���̣��ԃ� | 1×10-6 | 90s�ԃ� | 50×10-6/ 100×10-6 |
| 11 | �� �� �� | HCN | ��0-200��×10-6 | ±5%���M���̣��ԃ� | 0.1×10-6 | 200s�ԃ� | 10×10-6/ 20×10-6 |
| 12 | �� �� | O3 | ��0-1.0-5.0��×10-6 | ±5%���M���̣��ԃ� | 0.01×10-6 | 120s�ԃ� | 0.3×10-6/ 5.0×10-6 |
| 13 | �� �� | F2 | ��0-1��×10-6 | ±5%���M���̣��ԃ� | 0.01×10-6 | 60s�ԃ� | 1.0×10-6/ 5.0×10-6 |
| 14 | �� �� �� | HF | ��0-10��×10-6 | ±5%���M���̣��ԃ� | 0.1×10-6 | 60s�ԃ� | 3×10-6/ 10×10-6 |
| 15 | �� �� �� | HCL | ��0-30-200��×10-6 | ±5%���M���̣��ԃ� | 0.1×10-6 | 60s�ԃ� | 5×10-6/ 10×10-6 |
| 16 | �� �� �� | HBr | ��0-30��×10-6 | ±5%���M���̣��ԃ� | 0.1×10-6 | 60s�ԃ� | ע�� |
| 17 | �h������ | C2H4O | ��0-100��×10-6 | ±5%���M���̣��ԃ� | 0.1×10-6 | 120s�ԃ� | 1×10-6/ 10×10-6 |
| 18 | �� �� | COCl2 | ��0-1��×10-6 | ±5%���M���̣��ԃ� | 0.01×10-6 | 60s�ԃ� | 0.1×10-6/ 0.5×10-6 |
| 19 | �� �� | SiH4 | ��0-20��×10-6 | ±5%���M���̣��ԃ� | 0.1×10-6 | 60s�ԃ� | 1×10-6/ 10×10-6 |
| 20 | �N �� | GeH4 | ��0-2��×10-6 | ±5%���M���̣��ԃ� | 0.1×10-6 | 60s�ԃ� | ע�� |
| 21 | �� �� | AsH3 | ��0-1��×10-6 | ±5%���M���̣��ԃ� | 0.1×10-6 | 60s�ԃ� | ע�� |
| 22 | �������� | ClO2 | ��0-1.0-200��×10-6 | ±5%���M���̣��ԃ� | 0.01×10-6 | 120s�ԃ� | 0.1×10-6/ 10×10-6 |
| 23 | �Ě仯�� | N2H4 | ��0-1��×10-6 | ±5%���M���̣��ԃ� | 0.01×10-6 | 60s�ԃ� | ע�� |
| 24 | �� �� �� | B2H6 | ��0-0.5��×10-6 | ±5%���M���̣��ԃ� | 0.01×10-6 | 60s�ԃ� | ע�� |
| 25 | �� �� | NH3 | ��0-1000��×10-6 | ±5%���M���̣��ԃ� | 1×10-6 | 90s�ԃ� | 25×10-6/ 50×10-6 |
| 26 | �� �� | H2 | ��0.00-4.00�� % | ±5%���M���̣��ԃ� | 0.01% | 60s�ԃ� | 1.00% / 2.00% |
| 27 | �� �� | CH4 | ��0.00-5.00��% | ±5%���M���̣��ԃ� | 0.01% | 60s�ԃ� | 1.00% / 2.00% |